UHP Coil Tubing

Cardinal UHP Stainless Steel Tubing: Tailored Solutions for Semiconductor and Critical Gas Applications

Cardinal offers premium-grade stainless steel tubing solutions for industries requiring the highest purity and safety standards, particularly in semiconductor manufacturing and other critical gas applications. Our specialized tubing options Electropolished (EP) Coiled Tubing and Cleaned for Oxygen Service (CFOS) Coiled Tubing address distinct operational needs for delivering ultra-high purity gases and reactive gases like oxygen.

Electropolished (EP) Coiled Tubing: Maximum Purity and System Integrity

Cardinal’s Electropolished (EP) Coiled Tubing is engineered for processes where the absolute purity of the gas is crucial, such as in semiconductor manufacturing processes like etching, chemical vapor deposition (CVD), ion implantation, and lithography. Our EP coiled tubing undergoes a proprietary electropolishing process in a single continuous draw, ensuring a uniform, ultra-smooth internal surface. This electropolished finish eliminates micro-imperfections that could trap contaminants or moisture, which are potential threats to ultra-high purity (UHP) gas delivery.

Key Advantages of EP Coiled Tubing:

• Reduced Contamination Risk: The electropolished surface minimizes the risk of particle generation and adsorption of impurities, ensuring consistent gas purity.
• Improved Corrosion Resistance: Electropolishing removes surface irregularities, reducing corrosion risks, especially in high-purity gas applications.
• Coiled Design Benefits: Continuous coiled tubing reduces the number of welds or connections needed, significantly lowering the risk of leaks and enhancing system reliability. This also results in faster installation, lower labor costs, and long-term operational efficiency.

EP coiled tubing is increasingly the preferred choice not only in semiconductors but also in refining, petrochemical, offshore, and power generation industries, where purity, system integrity, and ease of installation are paramount.

Cleaned for Oxygen Service (CFOS) Coiled Tubing: Ensuring Safety with Reactive Gases

Cardinal’s Cleaned for Oxygen Service (CFOS) Coiled Tubing is specifically designed for transporting reactive gases, like oxygen, which require stringent cleanliness standards to prevent hazardous reactions. Oxygen, in particular, poses a significant risk of ignition or explosion when it comes into contact with contaminants, making cleanliness critical. Our CFOS tubing undergoes rigorous cleaning and validation procedures to meet industry standards for oxygen service, ensuring the internal surfaces are free from hydrocarbons, moisture, and particulate contamination.

Key Advantages of CFOS Tubing:

• Rigorous Cleaning Processes: Our CFOS tubing is cleaned and validated to ensure it is free from any residues that could react dangerously with oxygen or other reactive gases.
• High-Safety Standards: Meets and exceeds industry-specific safety regulations and standards for oxygen service in industries such as pharmaceuticals, aerospace, medical gases, and refining.
• Enhanced Durability: CFOS tubing is manufactured to maintain high integrity under pressure, ensuring long-lasting performance in high-demand applications.

Choosing Between EP Coiled Tubing and CFOS Coiled Tubing

While both tubing types are designed for high-purity applications, they serve different purposes. EP coiled tubing is ideal for semiconductor and ultra-high purity gas applications where contamination control is critical, and where system efficiency and fewer connections are beneficial. CFOS coiled tubing, on the other hand, is essential for safely transporting oxygen or other reactive gases, where cleanliness and safety standards are the top priority.

For companies needing the highest purity in semiconductor processes, EP coiled tubing is the optimal choice. For those working with oxygen or other reactive gases, CFOS tubing provides unmatched safety and reliability.

Electropolished Stainless Steel Tubing Specifications – Cardinal UHP

Cardinal Ultra High Purity (UHP) 316L stainless steel tubing is engineered to meet the most demanding standards in ultra-high purity gas, chemical distribution, and WFI (Water for Injection) systems. Our tubing undergoes a rigorous electropolishing process to ensure maximum purity and performance in critical applications.

Key Specifications:

• Electropolished Surface Finish: Tubing is electropolished to a surface roughness of 10 µin / 0.25 µm Ra, ensuring a smooth and contamination-free interior.
• Material Compliance: Manufactured from 316L stainless steel, meeting ASTM specifications for consistent physical, dimensional, and chemical composition.
• Controlled Sulfur Content: Tubing features controlled sulfur content to enhance weldability and reduce non-metallic inclusions, resulting in cleaner, more reliable welds.
• Cleanroom Packaging: Final cleaning and packaging are conducted in a Class 10 (ISO Class 4) cleanroom, ensuring the highest level of cleanliness and purity.
• DI Water Rinse: Tubing is rinsed with 0.1 µ filtered 60°C deionized (DI) water to remove particulates and ensure cleanliness.
• Nitrogen Dried: Tubing is dried using 0.005 µ filtered 120°C nitrogen to prevent contamination and moisture retention.

Applications:

• Ultra-High Purity (UHP) gas systems
• Chemical distribution systems
• WFI (Water for Injection) systems

Certifications:

• Mill Test Reports provided with each shipment.
• Certificate of Conformance provided with each shipment.

Available Tubing Lengths:

• 1/8" OD x 0.020" wall – up to 100 feet (30 meters)
• 1/4" OD x 0.035" wall – up to 330 feet (100 meters)
• 3/8" OD x 0.035" wall – up to 330 feet (100 meters)
• 1/2" OD x 0.049" wall – up to 330 feet (100 meters)
• Dual Containment Tubing – up to 100 feet
• 1/4" x 1/2" Coax Tubing – up to 330 feet (100 meters)

Metric Sizes Available:
Custom lengths available upon request for diameters of 6mm, 8mm, 10mm, and 12mm.

Cardinal UHP CFOS (Cleaned for Oxygen Service) Tubing Specifications

Cardinal's Cleaned for Oxygen Service (CFOS) stainless steel tubing is meticulously engineered to meet the highest cleanliness standards, ensuring safe and reliable performance when transporting reactive gases like oxygen. Our CFOS tubing is specifically designed for industries such as pharmaceuticals, aerospace, semiconductors, and medical gases, where safety and purity are paramount.

Key Specifications:

• Surface Finish: Interior surface roughness as low as 20 µin / 0.50 µm Ra ID, ensuring a clean, smooth surface to minimize contamination risks in high-purity applications.
• Material Compliance: Constructed from seamless 316L stainless steel, meeting stringent ASTM specifications for consistent physical, dimensional, and chemical composition.
• Controlled Sulfur Content: Tubing features controlled sulfur content for superior weldability and reduced non-metallic inclusions, ensuring cleaner welds and improved system integrity.
• Passivation: The tubing is NHO₃ (Nitric Acid) passivated, enhancing corrosion resistance and preventing contamination from residual particles.
• Packaging: Coils are single-bagged and carefully packaged to prevent damage during shipment, maintaining product quality and integrity upon arrival.

Certifications:

• Mill Test Reports included with every shipment, providing traceability and material verification.
• Certificate of Conformance included with every shipment, ensuring compliance with stringent industry standards.

Available Tubing Lengths:

• 1/8" OD x 0.020" wall – up to 800 feet (240 meters)
• 1/4" OD x 0.035" wall – up to 1000 feet (305 meters)
• 3/8" OD x 0.035" wall – up to 1000 feet (305 meters)
• 1/2" OD x 0.049" wall – up to 800 feet (240 meters)

Metric Sizes Available:
Custom lengths available upon request for diameters of 6mm, 8mm, 10mm, and 12mm.